The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2026

Filed:

Dec. 15, 2022
Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventors:

Hyun Yoon, Gyeonggi-do, KR;

Ki Hoon Choi, Chungcheongnam-do, KR;

Hyo Won Yang, Seoul, KR;

Tae Hee Kim, Gyeonggi-do, KR;

In Ki Jung, Gyeonggi-do, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/44 (2012.01); B23K 26/08 (2014.01); H10P 72/50 (2026.01);
U.S. Cl.
CPC ...
G03F 7/2041 (2013.01); G03F 1/44 (2013.01); B23K 26/0892 (2013.01); H10P 72/50 (2026.01);
Abstract

Disclosed is a substrate treating apparatus including a support unit that supports and rotates a substrate, a heating unit including a laser irradiator that irradiates laser light in a pattern formed in the substrate, a movement module that changes a location of the laser irradiator by moving the heating unit, and a controller that controls the support unit and the heating unit, the movement module moves the heating unit between a heating location, at which the laser light is irradiated to the substrate, and a standby location that deviates from the substrate, and the movement module rotates and linearly moves the heating unit.


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