Enhanced microelectromechanical system mirror apparatus

Abstract

According to an example aspect of the present invention, there is provided a Microelectrical System, MEMS, mirror apparatus, comprising a MEMS mirror, at least two pairs of actuation units, wherein each pair comprises a first and a second actuation unit and a first actuation unit of a first pair of actuation units comprises a stress relief unit, an inner actuator and an outer actuator, and the stress relief unit is coupled to the MEMS mirror and to the inner actuator, one end of the inner actuator is coupled to the stress relief unit of the actuation unit and another end of the inner actuator is coupled to the outer actuator of the actuation unit, the stress relief unit of the first actuation unit of the first pair of actuation units is in between the MEMS mirror and an inner actuator of a second actuation unit of a second pair of actuation units, and the inner actuator of the first actuation unit of the first pair of actuation units is in between a stress relief unit of a second actuation unit of the first pair of actuation units and an outer actuator of a second actuation unit of a second pair of actuation units.