The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Jun. 01, 2023
Si-ware Systems, Cairo, EG;
Tarek Mohamed Zeinah, Cairo, EG;
Bassem Mortada, Cairo, EG;
Momen Anwar, Cairo, EG;
Mohamed Ramadan, El Gharbia, EG;
Mohamed Hamouda, Cairo, EG;
Yasser M. Sabry, Cairo, EG;
Diaa Khalil, Cairo, EG;
Ahmed Shebl, Cairo, EG;
Bassam Saadany, Cairo, EG;
Ahmed Emad, Qalyubia, EG;
Mohamed Elsayed, Obour City, EG;
Moez Elmassry, Giza, EG;
Abstract
Aspects of the disclosure relate to an apparatus including an opto-electrical probe card platform for wafer-level testing of optical micro-electro-mechanical-systems (MEMS) structures. The probe card platform includes an electrical probe card including alignment needles for aligning with an optical MEMS structure during testing thereof. The probe card platform further includes an optical head configured to direct input light to towards the optical MEMS structure through the electrical probe card and an optical positioner attached to the electrical probe card and configured to align the optical head. The apparatus may further include a camera and a processor configured to process at least one image obtained by the camera and to generate alignment assistance data to assist the optical positioner in aligning the optical head.