The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Apr. 03, 2023
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Kyuyoung Hwang, Suwon-si, KR;
Byungjoon Kang, Suwon-si, KR;
Daihyun Kim, Suwon-si, KR;
Sungmin Kim, Suwon-si, KR;
Hwang Suk Kim, Suwon-si, KR;
Mihyun Park, Suwon-si, KR;
Jungmin Oh, Suwon-si, KR;
Hyosan Lee, Suwon-si, KR;
Byoungki Choi, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C23F 1/16 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); C23F 1/16 (2013.01); H01L 21/31111 (2013.01); H01L 21/32134 (2013.01);
Abstract
Provided are an etching composition including an oxidizing agent, an ammonium salt, an aqueous solvent, and an accelerator, a method of preparing a metal-containing film etching by using the same, and a method of manufacturing a semiconductor device by using the same.