The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Apr. 08, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Steven Trey Tindel, Austin, TX (US);
Paul B. Reuter, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.