The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Oct. 14, 2022
Applicant:
Ngk Insulators, Ltd., Nagoya-City, JP;
Inventors:
Keita Yamana, Nagoya-City, JP;
Kazuhiro Nobori, Handa-City, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01);
Abstract
An AlN ceramic substrate of the present invention contains yttrium aluminate, and has a volume resistivity of 3×10Ωcm or more at 550° C.
Yamana, Keita. (2026). Aln ceramic substrate and heater for semiconductor manufacturing apparatus (U.S. Patent No. 12588454). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12588454
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile