The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Dec. 21, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vivek Bharat Shah, Santa Clara, CA (US);
Chunlei Zhang, Santa Clara, CA (US);
Anders Andelman Nottrott, Alameda, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 13/04 (2006.01); G05B 19/18 (2006.01);
U.S. Cl.
CPC ...
G05B 13/048 (2013.01); G05B 19/188 (2013.01); G05B 2219/45031 (2013.01);
Abstract
A method includes receiving data indicative of properties of a substrate support from one or more sensors of a removable sensor assembly disposed proximate to the substrate support. The method further includes providing data based on the data indicative of properties of a substrate support to a physics-based model of the substrate support. The method further includes receiving predicted performance data of the substrate support from the physics-based model.