The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2026

Filed:

Feb. 15, 2022
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tadashi Hattori, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G03F 7/00 (2006.01); G01B 11/00 (2006.01); H01L 21/027 (2006.01); H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G01B 11/00 (2013.01); G01B 11/02 (2013.01); G01B 11/026 (2013.01); G03F 7/0002 (2013.01); H01L 21/027 (2013.01); H01L 21/30 (2013.01);
Abstract

The present invention provides a measurement apparatus that measures a position of an object, comprising: a detector configured to irradiate a measurement target point of the object with light having a plurality of wavelengths, and detect a position of the measurement target point based on the light reflected by the measurement target point; and a processor configured to determine the position of the object based on a detection result of the detector, wherein the detection result includes an error represented by a waveform in which an amplitude cyclically changes in accordance with a distance between the detector and the object, and wherein the processor is configured to cause the detector to detect the position of the measurement target point at the distance at which the amplitude in the waveform of the error falls within an allowable range.


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Hattori, Tadashi. (2026). Measurement apparatus, lithography apparatus, and method of manufacturing article (U.S. Patent No. 12585202). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12585202

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