The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Aug. 29, 2022
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventors:
Christopher Louis Panuski, Somerville, MA (US);
Ian Robert Christen, Cambridge, MA (US);
Dirk Robert Englund, Brookline, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/10 (2006.01); B23K 26/362 (2014.01); G02F 1/025 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
G02F 1/025 (2013.01); B23K 26/362 (2013.01); B23K 2101/40 (2018.08);
Abstract
Methods and systems are described for precisely adjusting characteristics of microfabricated devices after device fabrication. The adjustments can be carried out in parallel on a plurality of the microfabricated devices. By carrying out the adjustment process, uniformity of feature sizes to a few picometers (one standard deviation) and corresponding uniformity of operating characteristics for a plurality of microfabricated devices are possible.