The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Oct. 21, 2021
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Eric Peter Goodwin, Oro Valley, AZ (US);
Zhi-Wei Lin, Belmont, CA (US);
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); B23K 26/03 (2006.01); B23K 26/062 (2014.01); B23K 26/08 (2014.01); B23K 26/342 (2014.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0608 (2013.01); B23K 26/032 (2013.01); B23K 26/062 (2015.10); B23K 26/0861 (2013.01); B23K 26/342 (2015.10); G01B 11/026 (2013.01); G01B 11/0625 (2013.01); G01B 11/0658 (2013.01); G01B 11/0683 (2013.01);
Abstract
Detectors are situated along a tilted optical axis to receive optical radiation from a work surface. Variations in the received optical power are used to estimate a work surface positional along a work surface axis. The received optical power can be emitted from the work surface and an estimated temperature of the work surface used to adjust the received optical power. One or two single element detectors or a linear detector can be used. A position of a focused spot produced from the received optical power at the linear detector can be used to assess work surface axial position.