Semiconductor device and method of manufacturing the same

Abstract

A semiconductor device includes parallel active regions on a substrate and extending in a first horizontal direction; gate structures intersecting the active regions, extending in a second horizontal direction, and including first and second gate structures opposing each other in the second horizontal direction; source/drain regions including first and second source/drain regions, on at least one side of the gate structures and on the active regions; a gate separation pattern between the first and second gate structures; a vertical conductive structure in the gate separation pattern; contact plugs including a first contact plug electrically connected to the first source/drain region and the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure; and a contact separation pattern separating the first and second contact plugs, having a portion contacting an upper surface of the vertical conductive structure.