The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2026

Filed:

Oct. 27, 2023
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Henrik Flaske, Dresden, DE;

Meyer Björn, Dresden, DE;

Mattausch Gösta, Dresden, DE;

Stefan Weiss, Dresden, DE;

Volker Kirchhoff, Dresden, DE;

Burkhard Zimmermann, Dresden, DE;

Rainer Labitzke, Dresden, DE;

Jörg Kubusch, Dresden, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32596 (2013.01); C23C 14/3407 (2013.01); C23C 14/54 (2013.01); H01J 37/32055 (2013.01); H01J 37/3244 (2013.01); H01J 2237/332 (2013.01);
Abstract

A hollow cathode system generates a plasma. The system includes an anode device, a power supply for applying an electric current between a cathode tube and the anode device, and at least one gas reservoir for supplying the gas flowing through the cathode tube are used, in which at least two cathode tubes are used that are electrically connected to one another, and in which each cathode tube has a separate actuator with which the amount of gas flowing through the respective cathode tube is set.


Find Patent Forward Citations

Loading…