The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Feb. 09, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Pengyu Han, Fremont, CA (US);
Hong-Rui Chen, Taichung City, TW;
Shu-Yu Chen, Zhubei City, TW;
Wan-Hsueh Lai, New Taipei City, TW;
Pin Ham Lu, Taipei, TW;
Zhengping Yao, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes determining that conditions of a processing chamber have changed since a trained machine learning model associated with the processing chamber was trained. The method further includes determining whether a change in the conditions of the processing chamber is a gradual change or a sudden change. Responsive to determining that the change in the conditions of the processing chamber is a gradual change, the method further includes performing a first training process to generate a new machine learning model. Responsive to determining that the change in the conditions of the processing chamber is a sudden change, the method further includes performing a second training process to generate the new machine learning model. The first training process is different from the second training process.