The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Aug. 08, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Thomas Empante, Santa Clara, CA (US);
Yang Hu, Sunnyvale, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); C23C 16/14 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/04 (2013.01); C23C 16/14 (2013.01); H01L 21/28568 (2013.01);
Abstract
Methods and apparatus for selectively depositing a molybdenum layer on a substrate which includes contacting a substrate surface initially comprising a first portion comprising amorphous silicon, and a second portion comprising silicon and germanium with a molybdenum precursor to selectively form a molybdenum layer on the second portion of the substrate surface.