The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Apr. 11, 2023
Nomura Micro Science Co., Ltd., Atsugi, JP;
Hiroki Miyazawa, Atsugi, JP;
Yukio Noguchi, Atsugi, JP;
NOMURA MICRO SCIENCE CO., LTD., Atsugi, JP;
Abstract
An ultrapure water production system to produce an ultrapure water, includes a pre-treatment unit; a primary pure water production unit; a secondary pure water production unit; a storage unitprovided to precede the pre-treatment unitor between the pre-treatment unitand the primary pure water production unit, the storage unitbeing capable of storing raw water or treatable water; a recovery treatment unitto remove impurities mixed in a used ultrapure water obtained after use of the ultrapure water and containing hydrogen peroxide with passing a part or the whole of the hydrogen peroxide therethrough, to make a recovered water; and a circulatorto circulate the recovered water obtained from the recovery treatment unitto feed the recovered water back to the storage unit