The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Nov. 04, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
Takayoshi Tanaka, Kyoto, JP;
Masayuki Otsuji, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
In this substrate processing method, a water-repellent treatment is performed on a upper surface of a substrate so as to change the contact angle of pure water with respect to a flat surface to 90° or greater, and then a hydrophobic liquid is supplied to the upper surface of the substrate, thereby replacing a water repellent agent-containing liquid on the upper surface of the substrate with the hydrophobic liquid. After the hydrophobic liquid replacement step, a hydrophilic liquid is supplied to the upper surface of the substrate, thereby replacing the hydrophobic liquid on the upper surface of the substrate with the hydrophilic liquid. After the hydrophilic liquid replacement step, the hydrophilic liquid on the upper surface of the substrate is caused to flow and is removed from the upper surface of the substrate, and the upper surface of the substrate is thereby dried.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile