The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Dec. 29, 2022
Applicant:
Ichor Systems, Inc., Fremont, CA (US);
Inventor:
Michael Vogtmann, Templeton, CA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 25/00 (2022.01); B01F 25/43 (2022.01); H01L 21/67 (2006.01); B01F 101/58 (2022.01);
U.S. Cl.
CPC ...
B01F 25/43 (2022.01); H01L 21/67017 (2013.01); B01F 2025/914 (2022.01); B01F 2101/58 (2022.01);
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for mixing fluid flows. Fluid flow components for mixing flows utilize mixing elements configured to receive flows of two or more process fluid flows via fluid inlets, mix the fluid flow within the mixing element, and deliver mixed fluid to a down-stream fluid flow component or an outlet of an apparatus for controlling fluid flow.