The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Jul. 20, 2020
Applicant:
Analog Devices, Inc., Wilmington, MA (US);
Inventor:
Shrenik Deliwala, Andover, MA (US);
Assignee:
Analog Devices, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A61B 5/024 (2006.01); A61B 5/00 (2006.01);
U.S. Cl.
CPC ...
A61B 5/02427 (2013.01); A61B 5/6802 (2013.01); A61B 2562/0219 (2013.01); A61B 2562/0238 (2013.01); A61B 2562/028 (2013.01); A61B 2562/164 (2013.01); A61B 2562/227 (2013.01);
Abstract
A novel, modified MEMS accelerometer with additional ability to measure optical radiation due to integration of silicon photodiode in the silicon cap. The silicon cap is used to protect the MEMS based accelerometer from the environment. The function of the cap is enhanced to include optical measurement. The entire sensor element including accelerometer and photodiode (XL+PD) occupies no more space than the XL alone.