The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

Sep. 16, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Byunghoon Cho, Yongin-si, KR;

Namjung Kang, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H10B 12/50 (2023.02); H10B 12/09 (2023.02); H10B 12/315 (2023.02);
Abstract

A semiconductor device including a substrate including a cell area and a peripheral circuit area, a plurality of cell transistors in the cell area, a peripheral circuit in the peripheral circuit area, a first etch stop film covering the cell transistors, a second etch stop film covering the peripheral circuit and defining a bottom plug space passing therethrough, a capacitor structure in the cell area and including lower electrodes passing through the first etch stop film and respectively connected to the cell transistors, a peripheral circuit contact in the peripheral circuit area, the peripheral circuit contact passing through the second etch stop film and electrically connected to the peripheral circuit, and an insulating liner on a side wall portion of the second etch stop film defining the bottom plug space, the insulating liner surrounding a portion of a side wall of the peripheral circuit contact may be provided.


Find Patent Forward Citations

Loading…