The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

Sep. 28, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Phillip A. Criminale, Santa Clara, CA (US);

Zhiqiang Guo, San Jose, CA (US);

Andrew Myles, Sunnyvale, CA (US);

Martin Perez-Guzman, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H05K 1/183 (2026.01);
U.S. Cl.
CPC ...
H05K 1/183 (2013.01); G05B 13/024 (2013.01); H01L 21/67253 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01); H01L 21/68742 (2013.01); H01L 22/34 (2013.01); H05K 2201/10151 (2013.01); H05K 2201/10371 (2013.01);
Abstract

A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes storing the sensor data in a memory of the diagnostic disc. The method further includes wirelessly transmitting the sensor data to the computing system, using the wireless communication circuit. The method further includes terminating the secure wireless connection with the computing system and clearing the sensor data from the memory of the diagnostic disc.


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