The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Apr. 05, 2023
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Motohiro Takahashi, Tokyo, JP;
Masaki Mizuochi, Tokyo, JP;
Takanori Kato, Tokyo, JP;
Akira Nishioka, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/18 (2013.01); H01J 2237/20292 (2013.01); H01J 2237/24578 (2013.01);
Abstract
A stage device includes: a sample installation unit in which a positioning target is installed; a scale plate used to measure displacement of the sample installation unit in a vertical direction; and a lower axis table configured to support the scale plate. A free support unit is provided between the scale plate and the lower axis table.