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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12571984 B1

PDFFull Text
Date of Patent:
Mar. 10, 2026

Filed:

Sep. 10, 2021

Light wave phase interference improvement of digital micromirror device by means of mechanically stressing the device package

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Timothy N. Thomas, Portland, OR (US);

Robert Jordan Lear, Portland, OR (US);

Douglas E. Holmgren, Portland, OR (US);

Assaf Kidron, Cupertino, CA (US);

Nigel Swehla, Portland, OR (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Toan Ton

Int. Cl.
CPC ...
G02B 7/182 (2021.01); F16B 5/02 (2006.01); G02B 26/08 (2006.01); G03B 21/00 (2006.01); G03B 21/16 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/182 (2013.01); F16B 5/0258 (2013.01); F16B 5/0266 (2013.01); G02B 26/0833 (2013.01); G03B 21/008 (2013.01); G03B 21/16 (2013.01); G03F 7/70191 (2013.01);
Abstract

Embodiments of the present disclosure relate to mount apparatuses for digital micromirror devices of digital lithography systems and methods of mounting the digital micromirror devices. The mount apparatuses described herein retain spatial light modulators, such as DMDs. The mount apparatus enables the flattening of the DMD by providing a force such that the pair of contact pads contact the DMD. The DMD is positioned in a mounting frame of the mount apparatus. Contact pads of the mounting frame are operable to apply pressure to the DMD.

Find Patent Forward Citations

Quick Actions:

Thomas, Timothy. (2026). Light wave phase interference improvement of digital micromirror device by means of mechanically stressing the device package (U.S. Patent No. 12571984). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12571984

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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