The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Apr. 08, 2022
Applicant:
Edwards Japan Limited, Yachiyo, JP;
Inventors:
Assignee:
Edwards Japan Limited, Yachiyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/02 (2006.01); F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
F04B 37/02 (2013.01); F04D 19/042 (2013.01);
Abstract
A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion, which performs at least one of activation and regeneration of a gas absorbing substanceof the getter pump portion.