The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Nov. 20, 2023
Applicant:
Vm Inc., Icheonsi, KR;
Inventors:
Sang Woo Lee, Suwon-si, KR;
Woo Hyung Choi, Seongnam-si, KR;
Assignee:
VM Inc., Icheonsi, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 54/02 (2006.01); B65G 47/90 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 54/02 (2013.01); B65G 47/90 (2013.01); H01L 21/67709 (2013.01); H01L 21/67715 (2013.01); H01L 21/67724 (2013.01); H01L 21/67173 (2013.01); H01L 21/6773 (2013.01);
Abstract
Disclosed is a substrate transfer apparatus including a moving plate including an upper magnetic levitation rail and a lower magnetic levitation rail, a processing chamber disposed adjacent to the moving plate and that processes a substrate, and a shuttle disposed between the upper magnetic levitation rail and the lower magnetic levitation rail, being moved on the moving plate, and that accommodates the substrate.