The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

Oct. 11, 2022
Applicant:

Niterra Co., Ltd., Nagoya, JP;

Inventor:

Yasuaki Kimikado, Nagoya, JP;

Assignee:

NITERRA CO., LTD., Nagoya, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32715 (2013.01); H01J 2237/2007 (2013.01); H01L 21/6833 (2013.01);
Abstract

A plate-shaped member of a holding device has a first surface having a gas outlet, and a second surface having a gas inlet and positioned opposite to the first surface. The plate-shaped member includes a plane-parallel gas passage extending parallel to the first surface and including a connection hole, and a gas inflow/outflow passage connected to the connection hole and providing communication between the gas outlet or the gas inlet and the plane-parallel gas passage. A porous body is disposed in the gas inflow/outflow passage and projects into the plane-parallel gas passage from the connection hole. The porous body includes a wide portion disposed in the plane-parallel gas passage. A dimension of the wide portion on a cross section taken along a plane orthogonal to the first surface is greater than a hole width of the connection hole.


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