The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Apr. 19, 2021
Ion implantation device with energy filter having additional thermal energy dissipation surface area
Applicant:
Mi2-factory Gmbh, Jena, DE;
Inventors:
Florian Krippendorf, Jena, DE;
Constantin Csato, Jena, DE;
Assignee:
mi2-factory GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01); H01J 2237/002 (2013.01); H01J 2237/057 (2013.01);
Abstract
An ion implantation device () comprising an energy filter (), wherein the energy filter () has a thermal energy dissipation surface area, wherein the energy filter () comprises a membrane with a first surface and a second surface disposed opposite to the first surface, the first surface being a structured surface.