The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

Feb. 23, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Albert Liu, Fullerton, CA (US);

Mitesh Harshad Sanghvi, Dublin, CA (US);

Venkatanarayana Shankaramurthy, San Jose, CA (US);

Yulian Yao, Santa Clara, CA (US);

Xinhai Han, Palo Alto, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01); G05B 13/04 (2006.01);
U.S. Cl.
CPC ...
G05B 13/0265 (2013.01); G05B 13/042 (2013.01);
Abstract

A method includes identifying a material associated with a substrate processing operation of a recipe. The method further includes determining an expected total residual thickness value subsequent to the substrate processing operation. The method further includes determining, based on the expected total residual thickness value, an expected material thickness value of the material associated with the substrate processing operation. The method further includes updating the recipe based on the material and the expected material thickness value of the material to generate an updated recipe. The method further includes causing a substrate to be processed based on the updated recipe.


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