The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Apr. 27, 2022
Sumitomo Chemical Company, Limited, Tokyo, JP;
Katsuhiro Komuro, Osaka, JP;
Koji Ichikawa, Osaka, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition: wherein R, Rand Reach represent a hydroxy group, *—O—R, *—O-L-CO—O—R, etc.; Lrepresents an alkanediyl group; Rrepresents an acid-labile group; Rto Reach represent a halogen atom, a haloalkyl group, etc.; A, Aand Aeach represent a hydrocarbon group, etc.; m1 and m7 represent an integer of 0 to 5, m2 to m6, m8 and m9 represent an integer of 0 to 4, 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more; Xrepresents a single bond, —CH—, etc.; and Alrepresents an organic anion.