The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Dec. 28, 2022
Semes Co., Ltd., Cheonan-si, KR;
Da-Som Bae, Seoul, KR;
Kyeong Hee Kang, Hwaseong-si, KR;
Young Ran Ko, Daegu, KR;
Mi Young Jo, Hwaseong-si, KR;
Semes Co., LTD., Cheonan-si, KR;
Abstract
The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile