The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Mar. 14, 2023
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Eric Peter Goodwin, Oro Valley, AZ (US);
Daniel Gene Smith, Tucson, AZ (US);
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02098 (2022.01); G01B 9/02 (2022.01); G01B 9/02015 (2022.01); G01B 11/16 (2006.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02098 (2013.01); G01B 9/0203 (2013.01); G01B 9/02087 (2013.01); G01B 9/02089 (2013.01); G01B 9/02095 (2013.01); G01B 11/162 (2013.01); G01B 11/2441 (2013.01); G01B 2290/70 (2013.01);
Abstract
Shearography systems provide independent setting of fringe frequency and shear magnitude by situating an interferometer with a tiltable reflector proximate a pupil plane of an imaging optical system. Fringe frequency can be selected based on a modified Savart plate. In other examples, a Wollaston prism or a polarization grating is translated with respect to an image sensor to vary shear magnitude while maintaining a substantially fixed fringe frequency.