Structured discrete beam formation for cutting transparent substrates

Abstract

A method includes emitting an ultra-short pulse laser beam from a laser source. The method also includes forming the laser beam into a plurality of discrete beams via an optical array, where intersecting discrete beams form a structured light pattern comprising a plurality of voxels. A first subset of the plurality of voxels defining a line and a second subset of the plurality of voxels lie outside the line. The method also includes forming a plurality of voids in a substrate by aligning the structured light pattern onto the substrate, each voxel of the plurality of voxels forming a discrete void in the substrate, each void separated by the substrate. The method includes, after forming the plurality of voids in the substrate at a plurality of different positions, forming an article by separating one portion of the substrate from a base portion of the substrate.