The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Nov. 30, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Dinkar Nandwana, Chandler, AZ (US);
Allen D'ambra, Phoenix, AZ (US);
Dinh Tran, Tempe, AZ (US);
Ankit Kimtee, Phoenix, AZ (US);
Eric Shero, Phoenix, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 9/027 (2006.01); B08B 3/08 (2006.01); B08B 9/02 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B08B 9/027 (2013.01); B08B 3/08 (2013.01); B08B 9/021 (2013.01); B08B 2209/027 (2013.01); C23C 16/4405 (2013.01); C23C 16/4407 (2013.01); C23C 16/45565 (2013.01); H01J 37/3244 (2013.01); H01J 37/32853 (2013.01);
Abstract
Cleaning fixtures for cleaning a showerhead assembly are disclosure. The cleaning fixtures include: a fixture body incorporating three or more cavities, each cavity being separate from an adjacent cavity by a partition, and a number of channels associated with each cavity for fluidly connecting the cavities with an upper surface of the fixture body.