The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2026

Filed:

Jan. 03, 2024
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Shunpei Yamazaki, Tokyo, JP;

Masami Jintyou, Tochigi, JP;

Yukinori Shima, Gunma, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 99/00 (2025.01); H01L 21/02 (2006.01); H10D 30/67 (2025.01); H10D 64/66 (2025.01);
U.S. Cl.
CPC ...
H10D 99/00 (2025.01); H01L 21/02326 (2013.01); H01L 21/0234 (2013.01); H01L 21/02472 (2013.01); H01L 21/02483 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02573 (2013.01); H01L 21/0262 (2013.01); H10D 30/6715 (2025.01); H10D 30/673 (2025.01); H10D 30/6739 (2025.01); H10D 30/6755 (2025.01); H10D 64/667 (2025.01);
Abstract

Provided is a method for manufacturing a semiconductor device whose electric characteristics are prevented from being varied and whose reliability is improved. In the method, an insulating film is formed over an oxide semiconductor film, a buffer film is formed over the insulating film, oxygen is added to the buffer film and the insulating film, a conductive film is formed over the buffer film to which oxygen is added, and an impurity element is added to the oxide semiconductor film using the conductive film as a mask. An insulating film containing hydrogen and overlapping with the oxide semiconductor film may be formed after the impurity element is added to the oxide semiconductor film.


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