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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12562358 B1

PDFFull Text
Date of Patent:
Feb. 24, 2026

Filed:

Apr. 26, 2023

System and method for detecting endpoint in plasma processing

Applicant:

Horiba Stec Co., Ltd., Kyoto, JP;

Inventors:

Terry R. Turner, Austin, TX (US);

Jerome R. Cannon, Austin, TX (US);

Assignee:

HORIBA STEC CO., LTD., , JP;

Attorney:

Brooks Kushman P.C.

Primary Examiner:

Rudy Zervigon

Int. Cl.
CPC ...
H01J 37/32 (2006.01); G01N 22/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32963 (2013.01); G01N 22/00 (2013.01); H01J 37/32091 (2013.01); H01J 37/32357 (2013.01); H01J 37/32568 (2013.01); H01J 37/32577 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/334 (2013.01);
Abstract

A plasma processing control method for detecting an endpoint and controlling plasma processing is disclosed. The plasma processing control method includes tracking one or more harmonics that are produced due to nonlinearity of an impedance of a plasma environment. The one or more harmonics are associated with voltage, current, or a combination thereof. The plasma processing control method further includes analyzing the tracked one or more harmonics and detecting an endpoint of plasma processing based on the analysis of the tracked one or more harmonics. Thereafter, the plasma processing control method includes stopping the plasma processing based on the detected endpoint.

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Turner, Terry. (2026). System and method for detecting endpoint in plasma processing (U.S. Patent No. 12562358). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12562358

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