The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2026

Filed:

Oct. 29, 2021
Applicant:

Psk Inc., Gyeonggi-do, KR;

Inventors:

Kwang-Sung Yoo, Gyeonggi-do, KR;

Geon-Jong Kim, Gyeonggi-do, KR;

Tae-Hwan Youn, Gyeonggi-do, KR;

Assignee:

PSK Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); H01J 37/3244 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01J 2237/334 (2013.01);
Abstract

The present invention provides an apparatus for processing a substrate. The apparatus for processing a substrate may comprise: a first housing; a second housing combined with the first housing to define an internal space; a rotation coupling part for O fastening the first housing and the second housing to each other such that one of the first housing and the second housing is rotatable with respect to the other one of the first housing and the second housing; and a channel which supplies a fluid to the internal space or discharges the fluid from the internal space, and has at least a part thereof inserted into a pin hole formed in the rotation coupling part.


Find Patent Forward Citations

Quick Actions:

Yoo, Kwang-Sung. (2026). Apparatus for processing substrate (U.S. Patent No. 12562346). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12562346

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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