The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2026

Filed:

Sep. 23, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

David Everton Norman, Bountiful, UT (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); G06F 30/20 (2020.01); G06N 20/00 (2019.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41885 (2013.01); G06F 30/20 (2020.01); G06N 20/00 (2019.01); H01L 21/67276 (2013.01); G05B 2219/23005 (2013.01); G05B 2219/23288 (2013.01); G05B 2219/2602 (2013.01);
Abstract

A method includes identifying at least one of historical data associated with historical substrate lots processed by substrate processing tools in a substrate processing facility or simulated data for simulated substrate lots processed by simulated substrate processing tools. The method further includes generating features from the at least one of the historical data for the historical substrate lots or the simulated data for the simulated substrate lots. The method further includes training a machine learning model with data input comprising the features to generate a trained machine learning model. The trained machine learning model is capable of generating one or more outputs indicative of one or more corrective actions to be performed in the substrate processing facility.


Find Patent Forward Citations

Norman, David. (2026). Machine learning platform for substrate processing (U.S. Patent No. 12560921). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12560921

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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