The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Sep. 11, 2023
Applicant:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Inventors:
Assignee:
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/125 (2013.01);
Abstract
Disclosed are a MEMS gas sensor and a manufacturing method thereof. The MEMS gas sensor includes a substrate having a recess, a membrane disposed in the recess and having a through-hole configured to expose a portion of a top surface of the substrate, which is disposed at a central portion of the recess, sensing electrodes disposed in the membrane, and a sensing layer disposed on each of bottom and top surfaces of the membrane and disposed in the through-hole.