The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Sep. 22, 2023
Korea University Research and Business Foundation, Seoul, KR;
Hyung Min Lee, Seoul, KR;
Seung Beom Ku, Seongnam-si, KR;
Abstract
Disclosed is a micro concentration monitoring apparatus. A micro concentration monitoring apparatus includes: a variable frequency driver circuit unit that is coupled to a MEMS sensor and supplies constant power to the MEMS sensor within a set bandwidth; and a reading circuit unit that measures a resonance frequency displacement value of the MEMS sensor according to a change in dielectric constant of a target based on power supplied from the variable frequency driver circuit, and measures the resonance frequency displacement value of the MEMS sensor through a plurality of measurement channels, respectively.
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