The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Aug. 03, 2023
Seiko Epson Corporation, Tokyo, JP;
Kohei Yamada, Shiojiri, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A laser interferometer includes: a light source configured to emit laser light; an optical modulator including a vibrator driven by a drive signal and configured to superimpose a modulation signal on the laser light; a photodetector configured to receive the laser light including the modulation signal and a sample signal derived from an object and output a light receiving signal; a calculator configured to demodulate the sample signal from the light receiving signal based on a reference signal; and a signal generator configured to output the drive signal and the reference signal. The optical modulator includes: the vibrator including a first vibration portion and a second vibration portion that vibrates in a phase opposite to that of the first vibration portion; a first optical modulator provided in the first vibration portion and configured to modulate the laser light; a second optical modulator provided in the second vibration portion and configured to modulate the laser light modulated by the first optical modulator; and a detour optical path configured to cause the laser light modulated by the first optical modulator to enter the second optical modulator.