The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Nov. 11, 2024
Cnbm Research Institute for Advanced Glass Materials Group Co.,ltd., Bengbu, CN;
Abstract
A slot-die type gas distribution device for photovoltaic manufacturing is provided. The slot-die type gas distribution device includes a first gas distribution device () at a process chamber inlet () and a second gas distribution device () at a process chamber outlet (). The first gas distribution device () is connected to the process chamber inlet () through a flat quadrangular first communication device (), and the second gas distribution device () is connected to the process chamber outlet () through a flat quadrangular third communication device (). The device effectively improves the gas distribution uniformity in the process chamber.
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