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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12556152 B1

PDFFull Text
Date of Patent:
Feb. 17, 2026

Filed:

Mar. 31, 2023

Microwave providing apparatus, system including the same, and method of manufacturing semiconductor device

Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Yoonseok Choi, Suwon-si, KR;

Hanlim Kang, Seoul-si, KR;

Hyunwoo Jo, Hwaseong-si, KR;

Sangjeong Lee, Hwaseong-si, KR;

Assignee:

SEMES CO., LTD., Cheonan-si, KR;

Attorney:
Primary Examiner:

Ram N Kackar

Assistant Examiner:

Laureen undefined Chan

Int. Cl.
CPC ...
H03H 1/00 (2006.01); H01J 37/32 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H03H 1/00 (2013.01); H01J 37/32192 (2013.01); H01L 21/30621 (2013.01); H01L 21/3065 (2013.01); H01L 21/31122 (2013.01); H01L 21/31138 (2013.01); H01L 21/67069 (2013.01); H01L 21/67155 (2013.01); H01L 21/6719 (2013.01);
Abstract

Provided is a system including a microwave source configured to generate microwaves, a branch apparatus including an input port connected to the microwave source, first and second chambers configured to process a wafer by using the microwaves, a first filter configured to transfer the microwaves to or cut off the microwaves from the first chamber, and connected to a first output port of the branch apparatus, and a second filter configured to transfer the microwaves to or cut off the microwaves from the second chamber, and connected to a second output port of the branch apparatus.

Find Patent Forward Citations

Choi, Yoonseok. (2026). Microwave providing apparatus, system including the same, and method of manufacturing semiconductor device (U.S. Patent No. 12556152). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12556152

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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