The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2026

Filed:

May. 17, 2023
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventor:

Hyuk Kim, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02M 1/088 (2006.01); H01J 37/24 (2006.01); H01J 37/32 (2006.01); H02M 7/48 (2007.01); H02M 7/539 (2006.01);
U.S. Cl.
CPC ...
H02M 7/539 (2013.01); H01J 37/241 (2013.01); H01J 37/32174 (2013.01); H02M 1/088 (2013.01); H02M 7/4815 (2021.05);
Abstract

A power generator with partial sinusoidal waveform includes a resonance module circuit and a pulse module circuit. The resonance module circuit includes a plurality of resonance control switches, and generates a first output voltage by selectively turning on and off the plurality of resonance control switches based on a plurality of resonance control signals. The pulse module circuit includes a plurality of pulse control switches, and generates a second output voltage by selectively turning on and off the plurality of pulse control switches based on a plurality of pulse control signals. The power generator generates a bias power based on the plurality of resonance control signals, the plurality of pulse control signals, the first output voltage and the second output voltage. The bias power has a non-sinusoidal voltage waveform during an entire time interval and a sinusoidal voltage waveform during a partial time interval.


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Kim, Hyuk. (2026). Power generator with partial sinusoidal waveform, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same (U.S. Patent No. 12556111). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12556111

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