Method of predicting characteristics of semiconductor device and computing device performing the same

Abstract

To predict characteristics of a semiconductor device, basic training data corresponding to a combination of process data, device data and simulation result data are generated using a plurality of compact models. Each compact model generates the simulation result data indicating characteristics of a semiconductor device corresponding to the device data by performing simulation based on the device data, the plurality of compact models respectively corresponding to a plurality of process data and a plurality of semiconductor products. A deep learning model is trained based on the basic training data such that the deep learning model outputs prediction data indicating the characteristics of the semiconductor device. Target prediction data indicating characteristics of the semiconductor device included in a target semiconductor product are generated based on the deep learning model, the device data and the process data corresponding to the target semiconductor product.