The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2026

Filed:

Mar. 30, 2023
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Sang Hyun Yun, Yongin-si, KR;

Kab Jong Seo, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H10D 86/40 (2025.01); H10D 86/60 (2025.01);
U.S. Cl.
CPC ...
G03F 7/2051 (2013.01); H10D 86/40 (2025.01); H10D 86/60 (2025.01);
Abstract

A maskless exposure device includes: a light source for emitting a beam, a light modulator for modulating the beam according to an exposure pattern, an optical system for transferring the modulated beam onto a substrate in the form of a beam spot array, a position determining unit for generating relative position data between the beam spot array and the substrate, and a control unit for controlling the light modulator based on the position data of the position determining unit. The beam spot array includes alignment areas and out-of-alignment areas which are alternately disposed, on/off-spots which overlap the alignment areas, and neutral spots which overlap the out-of-alignment areas and at which the substrate is not irradiated with the beam, and a distance between on/off-spots adjacent to each other at a first point in time is different from a distance between on/off-spots adjacent to each other at a second point in time.


Find Patent Forward Citations

Yun, Sang. (2026). Maskless exposure device and display device (U.S. Patent No. 12554200). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12554200

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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