The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2026

Filed:

Oct. 26, 2023
Applicant:

Eagle Technology, Llc, Melbourne, FL (US);

Inventors:

Scott Rauscher, Washington, DC (US);

Haley Stumvoll, West Melbourne, FL (US);

James Drakes, Occoquan, VA (US);

Fraser R. Dalgleish, Vero Beach, FL (US);

Donna M. Kocak, Satellite Beach, FL (US);

Nicholas Alban, Palm Bay, FL (US);

Assignee:

EAGLE TECHNOLOGY, LLC, Melbourne, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/032 (2006.01); B81B 7/02 (2006.01); G01R 33/00 (2006.01); G01R 33/26 (2006.01);
U.S. Cl.
CPC ...
G01R 33/032 (2013.01); B81B 7/02 (2013.01); G01R 33/0052 (2013.01); G01R 33/26 (2013.01); B81B 2201/0271 (2013.01);
Abstract

A sensing system may include a microelectromechanical system (MEMS) device that may include a MEMS substrate having a resonator cavity formed therein, at least one MEMS resonator beam carried by the MEMS substrate within the resonator cavity, and a diamond layer carried by the substrate above the resonator cavity. The diamond layer may include at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS resonator beam. A resonator drive circuit may be coupled to drive the at least one MEMS resonator beam. A sensing circuit may be associated with the at least one nitrogen vacancy center to infer small changes in a magnetic field acceleration from phase perturbations in local magnetic field resonance.


Find Patent Forward Citations

Loading…