The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Mar. 22, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Yongjoo Lee, Seoul, KR;
Jongmo Yeo, Seoul, KR;
Gunbum Lee, Gyeonggi-do, KR;
Kiduk Kim, Gyeonggi-do, KR;
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Methods and apparatus for slit valve control are provided. In some embodiments, a slit valve system includes a slit valve body having an opening configured to permit passage of a substrate; a door in the valve body, configured to transition between an open position and a closed position in which the opening is closed; a pneumatic actuator coupled to the door, the pneumatic actuator including a moving member configured to exert a force on the door; and a controller coupled to the pneumatic actuator, the controller configured to control fluid pressure entering the pneumatic actuator based at least on a target actuation time of the door or target vibration of the door.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile