The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Mar. 02, 2021
Applicant:
Edwards Japan Limited, Yachiyo, JP;
Inventor:
Takashi Kabasawa, Yachiyo, JP;
Assignee:
Edwards Japan Limited, Yachiyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 37/14 (2006.01); F04B 39/00 (2006.01); F04D 19/04 (2006.01); F04D 29/70 (2006.01);
U.S. Cl.
CPC ...
F04D 19/042 (2013.01); F04B 37/14 (2013.01); F04B 39/00 (2013.01); F04D 19/04 (2013.01); F04D 29/701 (2013.01);
Abstract
A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.