The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Jul. 17, 2025
Seastar Chemicals Ulc, Sidney, CA;
Diana Fabulyak, Victoria, CA;
Rajesh Odedra, Altrincham, GB;
Wesley Phillip Graff, Singapore, SG;
Shaun Cembella, Victoria, CA;
Cassidy Conover, Saanich, CA;
SEASTAR CHEMICALS ULC, Sidney, CA;
Abstract
Specific organometallic compounds of Formula I: Q-Sn-(AR')or Formula II: Sn(NR(CH)A)useful for the deposition of high purity tin oxide, as well as methods of using such compounds are disclosed. Also disclosed are compositions of organometallic compounds useful for the deposition of high purity tin oxide that in combination improve stability. Also disclosed are processes for dry etching tin oxide with a particular etchant gas and/or a process for dry etching a substrate using a particular etchant gas with a specific additive.