The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Sep. 06, 2022
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Hidehiro Maeda, Yokohama, JP;

Toshimasa Shimoda, Ageo, JP;

Hajime Mitsuishi, Yokohama, JP;

Hiroshi Mori, Tokyo, JP;

Kishou Takahata, Tokyo, JP;

Masahiro Yoshihashi, Abiko, JP;

Takashi Shiomi, Yokohama, JP;

Yoshihiro Maehara, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01);
Abstract

A control device configured to control a supply condition of a gas which is supplied between two substrates that are to be bonded to each other by a substrate bonding device, is configured to control the supply condition based on a measurement result obtained by a measurement in relation to at least one of the substrate, another substrate bonded before the substrate is bonded, or the substrate bonding device, and the two substrates are bonded to each other by a contact region expanding after the contact region is formed in a center.


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