The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Jan. 06, 2022
Skyworks Global Pte. Ltd., Singapore, SG;
You Qian, Singapore, SG;
Rakesh Kumar, Singapore, SG;
Guofeng Chen, Fremont, CA (US);
Myeong Gweon Gu, Seoul, KR;
Myung Hyun Park, Seongnam-si, KR;
Jae Hyung Lee, Seoul, KR;
Michael Jon Wurtz, Lake Oswego, OR (US);
Abstract
An acoustic sensor (e.g., for use in a piezoelectric MEMS microphone) includes a substrate and a cantilever beam attached to the substrate. The cantilever beam has a proximal portion attached to the substrate and a distal portion that extends from the proximal portion to a free end of the beam, the beam extending in a first direction between the proximal portion and the free end, the distal portion of the beam having a corrugated section including one or more grooves that extend generally in the first direction. The corrugated section inhibits bending of the corrugated section along the length of the distal portion when the acoustic sensor is subjected to sound pressure. An electrode is disposed on or in the proximal portion of the beam.